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Volumn 36, Issue 12 A, 1997, Pages 7360-7361
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Formation of a new phase in Ru films by sputtering based on band calculation prediction
a
a
KEIO UNIVERSITY
(Japan)
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Author keywords
Band calculation; Phase formation; Ruthenium
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Indexed keywords
CALCULATIONS;
ELECTRON DIFFRACTION;
GLASS;
ION BEAMS;
LATTICE CONSTANTS;
RUTHENIUM;
SINGLE CRYSTALS;
SPUTTERING;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
BAND CALCULATION;
ION BEAM SPUTTERING METHOD;
FILM PREPARATION;
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EID: 0031344113
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.36.7360 Document Type: Article |
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Times cited : (6)
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References (1)
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