Effective multi-stage test equipment capacity allocation for semiconductor fabrication yield enhancement

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 1997, Pages 73-75

  Chen, Kyle D ^a   Akella, Ramakrishna ^a   Emami, Iraj ^a   McIntyre, Mike ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; INSPECTION; MATHEMATICAL MODELS; OPTIMIZATION; QUEUEING THEORY; SEMICONDUCTOR DEVICE TESTING;

MULTI STAGE INSPECTION PLANNING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031343820     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)