Electrical properties of thin Ta2O5 films obtained by thermal oxidation of Ta on Si

Proceedings of the International Conference on Microelectronics

Volumn 2, Issue , 1997, Pages 613-616

  Atanassova, E ^a   Spassov, D ^a  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; LEAKAGE CURRENTS; PERMITTIVITY; REFRACTIVE INDEX; SEMICONDUCTING SILICON; TANTALUM COMPOUNDS; THERMAL EFFECTS; THERMOOXIDATION;

RADIO FREQUENCY SPUTTERED FILMS;

SEMICONDUCTING FILMS;

EID: 0031343047     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)