Preparation and characterization of indium oxide (In2O3) films by activated reactive evaporation

Bulletin of Materials Science

Volumn 20, Issue 8, 1997, Pages 1029-1038

  Benoy, M D ^a   Pradeep, B ^a  

^a Department of Physics   (India)

Author keywords

Evaporation method; Oxides; Semiconductors; Thin films

Indexed keywords

ELECTRIC CONDUCTIVITY; EVAPORATION; FILM PREPARATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING INDIUM COMPOUNDS; TRANSPARENCY;

ACTIVATED REACTIVE EVAPORATION; HALL EFFECT MEASUREMENT; INDIUM OXIDE; POLYCRYSTALLINE FILMS;

THIN FILMS;

EID: 0031342758     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02745053     Document Type: Article

References (5)

1. Avaritsiotis J N and Howson R P 1981 Thin Solid Films 80 63
2. Badeker K 1907 Ann. Phys. (Leipzig) 22 749
3. Bardeen J, Blatt F J and Hall L H 1956 Proceedings of photoconductivity conference, Atlantic city (New York: Wiley)
4. Check G, Inone N, Goodnick S, Genis A, Wilmsen C and Dubow J B 1978 Appl. Phys. Lett. 33 643
5. Chopra K L 1979 Thin film phenomena (New York: Robert E Krieger Publishing Company) p. 182