Pyroelectric thin film sensor arrays integrated on silicon

Ferroelectrics

Volumn 201, Issue 1-4, 1997, Pages 147-156

  Willing, Bert ^a   Kohli, M ^a   Brooks, K ^a   Muralt, P ^a   Setter, N ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC COATINGS; LEAD COMPOUNDS; OXIDES; PYROELECTRICITY; SILICON WAFERS; SOL-GELS; TITANIUM DIOXIDE; ZIRCONIA;

MIXED OXIDES; PZT CERAMICS;

THIN FILMS;

EID: 0031342308     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199708228363     Document Type: Article

References (13)

1. R. W. Whatmore, A. Patel, N. M. Shorrocks, and F. W. Ainger, Ferroelectrics 104, 269-283 (1990).
2. R. Takayama, Y. Tomita, K. Iijima, and I. Ueda, Journal of Applied Physics 63, 5868-5872 (1988).
3. R. Takayama, Y. Tomita, K. Iijima, and I. Ueda, Journal of Applied Physics 61, 411-415 (1987).
4. A. Bell, Y. Huang, O. Paul, A. Nemirovsky, and N. Setter, Integegrated Ferroelectrics 6, 231-240 (1995).
5. P. Muralt, in PZT thin films for sensor and actuators, Limoges (F), 1996 (Revue de l'électricité et de l'électronique, in press (1996)).
6. S. G. Porter, Ferroelectrics 33, 193-206 (1981).
7. R. W. Whatmore, Rep. Prog. Phys. 49, 1335-1386 (1986).
8. A. Bell, Y. Huang, M. Kohli, O. Paul, P. Ryser, and M. Forster, in PbTiO3 Thin Films For Pyroelectric Detection, Pennsylvania (USA), 1994, p. 691-694.
9. Y. Huang, M. Daglish, I. Reaney, and A. Bell, in The pyroelectric properties of sol-gel prepared PbTiO3 thin films, 1993, p. 699-704.
10. Y. H. Huang, science technique Thesis, No. 1343 EPFL, 1995.
11. N. M. Shorrocks, A. Patel, M. J. Walker, and A. D. Parson, Microelectronic Engineering 29 (1995).
12. P. Muralt, K. Brooks, M. Kohli, T. Maeder, and C. Wüthrich, in Ferroelectric Thin Films for Microsystems, ECASIA 95, Montreux, Switzerland, 1995.
13. M. Kohli, Y. Huang, T. Maeder, C. Wuethrich, A. Bell, P. Muralt, N. Setter, P. Ryser, and M. Forster, Microelectronic Engineering 29, 93-96 (1995).