Coordination of yttrium in rf-sputtered amorphous films in the system SiO2-Y2O3

Journal of Non-Crystalline Solids

Volumn 221, Issue 2-3, 1997, Pages 302-306

  Shinoda, Takuya ^a   Hanada, Teiichi ^a   Tanabe, Setsuhisa ^a   Yao, Takeshi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; COORDINATION REACTIONS; IONS; OXIDES; PHYSICAL PROPERTIES; SPUTTERING; YTTRIUM;

EXTENDED X RAY ABSORPTION FINE STRUCTURE;

AMORPHOUS FILMS;

EID: 0031341896     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(97)00419-5     Document Type: Article

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