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Volumn 38, Issue 26, 1997, Pages 6333-6345

Effect of film formation process on residual stress of poly(p-phenylene biphenyltetracarboximide) in thin films

Author keywords

Imidization; Poly(amic acid) precursor; Polyimide

Indexed keywords

AMINES; AROMATIC COMPOUNDS; HEATING; INTERFACES (MATERIALS); MOLECULAR ORIENTATION; PLASTIC FILMS; RESIDUAL STRESSES; SOLVENTS; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

EID: 0031341387     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0032-3861(97)00193-6     Document Type: Article
Times cited : (40)

References (60)
  • 9
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    • ACS Symposium Series, ed. L. F. Thompson, C. G. Willson and S. Tagawa. American Chemical Society, Washington, DC
    • Ree, M. and Kirby, D. P., in Polymer for Microelectronics: Resists and Dielectrics, ACS Symposium Series, 537, ed. L. F. Thompson, C. G. Willson and S. Tagawa. American Chemical Society, Washington, DC, 1994, pp. 482-493.
    • (1994) Polymer for Microelectronics: Resists and Dielectrics , vol.537 , pp. 482-493
    • Ree, M.1    Kirby, D.P.2
  • 15
    • 0000293935 scopus 로고
    • ed. G. Hass and R. E. Thun. Academic, New York
    • Hoffman, W. R., in Physics of Thin Film, Vol. 3, ed. G. Hass and R. E. Thun. Academic, New York, 1966, p. 211.
    • (1966) Physics of Thin Film , vol.3 , pp. 211
    • Hoffman, W.R.1
  • 53
    • 0016986797 scopus 로고
    • Swalen, J. D., Sato, R., Tacke, M. and Fisher, J. F., IBM J. Res. Dev., 1977, 21, 168; Opt. Commun., 1976, 18, 387.
    • (1976) Opt. Commun. , vol.18 , pp. 387
  • 57
    • 85033141884 scopus 로고    scopus 로고
    • Unpublished results
    • Ree, M., Unpublished results.
    • Ree, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.