Anodic alumina: A promising constructional material for vacuum and semiconductor microelectronics

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 617-621

  Mukhurov, N I ^a   Efremov, G I ^a   Kotova, I F ^a  

^a INSTITUTE FOR MATHEMATICS   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; FIELD EMISSION CATHODES; MICROELECTRONICS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; VACUUM APPLICATIONS;

ANODIC ALUMINA;

ALUMINA;

EID: 0031340271     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)