Simulation of reflective notching with TEMPEST

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3051, Issue , 1997, Pages 595-605

  Pistor, Tom ^a   Neureuther, Andrew R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; COMPUTER SIMULATION; ELECTROMAGNETISM; LIGHT REFLECTION; PRINTING; PROJECTION SYSTEMS;

OPTICAL MICROLITHOGRAPHY; REFLECTIVE NOTCHING; SOFTWARE PACKAGE TEMPEST;

PHOTOLITHOGRAPHY;

EID: 0031339881     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.276039     Document Type: Conference Paper

References (8)