SCOPUS 정보 검색 플랫폼

Materials Science Forum

Volumn 258-263, Issue 9993, 1997, Pages 1767-1772

Diffusion and precipitation of oxygen in silicon doped with germanium

(3) Khirunenko, L I a Shakhovtsov, V I a Shumov, V V a

a INSTITUTE OF HYDROBIOLOGY (Ukraine)

Author keywords

Germanium; Oxygen; Relative oxygen loss; Silicon; Thermal donor

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; DIFFUSION IN SOLIDS; OXYGEN; PRECIPITATION (CHEMICAL); REACTION KINETICS; SEMICONDUCTING GERMANIUM; SEMICONDUCTOR DOPING;

THERMAL DONORS;

SEMICONDUCTING SILICON;

EID: 0031339555 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.258-263.1767 Document Type: Article

Times cited : (5)

References (13)

1
- 2742587702
- D.I.Brinkevich, N.I.Gorbacheva, V.V.Petrov, V.D.Tkachev, B.M.Turovskij and V.V.Chernyi, Doklady Akademii Nauk BSSR 30, 308 (1986).
- (1986) Doklady Akademii Nauk BSSR , vol.30 , pp. 308
- Brinkevich, D.I.¹ Gorbacheva, N.I.² Petrov, V.V.³ Tkachev, V.D.⁴ Turovskij, B.M.⁵ Chernyi, V.V.⁶

2
- 0006555948
- Y.M.Babitskij, N.I.Gorbacheva, P.M.Grinstein, M.A.Iliin, V.P.Kuznetsov, M.G.Milvidskij and B.M.Turovskij, Fizika i Tekhnika Poluprovodnikov 22, 307 (1988).
- (1988) Fizika I Tekhnika Poluprovodnikov , vol.22 , pp. 307
- Babitskij, Y.M.¹ Gorbacheva, N.I.² Grinstein, P.M.³ Iliin, M.A.⁴ Kuznetsov, V.P.⁵ Milvidskij, M.G.⁶ Turovskij, B.M.⁷

3
- 2742550977
- D.N.Korljakov, Neorganicheskie materialy 27 ,1333 (1991).
- (1991) Neorganicheskie Materialy , vol.27 , pp. 1333
- Korljakov, D.N.¹

4
- 3142555023
- D.I.Brinkevich, V.P.Markevich, L.I.Murin and V.V.Petrov, Fizika i Tekhnika Poluprovodnikov 26 , 682 (1992).
- (1992) Fizika I Tekhnika Poluprovodnikov , vol.26 , pp. 682
- Brinkevich, D.I.¹ Markevich, V.P.² Murin, L.I.³ Petrov, V.V.⁴

5
- 0041399082
- T.Y.Tan, R.Kleinhenz and C.P.Shneider, Mat. Res. Symp. Proc. 59, 195 (1986).
- (1986) Mat. Res. Symp. Proc. , vol.59 , pp. 195
- Tan, T.Y.¹ Kleinhenz, R.² Shneider, C.P.³

6
- 21544451797
- S.A.McQuaid, M.J.Binns, C.A.Londos, J.H.Tucker, A.R.Brown and R.C.Newman, J.Appl. Phys. 77 , 1427 (1995).
- (1995) J.Appl. Phys. , vol.77 , pp. 1427
- McQuaid, S.A.¹ Binns, M.J.² Londos, C.A.³ Tucker, J.H.⁴ Brown, A.R.⁵ Newman, R.C.⁶

7
- 3943067532
- A.K.Tipping, R.C.Newman, D.C.Newton and J.H.Tucker, Material Science Forum 10-12, 887 (1986).
- (1986) Material Science Forum , vol.10-12 , pp. 887
- Tipping, A.K.¹ Newman, R.C.² Newton, D.C.³ Tucker, J.H.⁴

8
- 3142594896
- V.M.Babich, N.P.Baran, K.I.Zotov, V.L.Kirica and V.B.Kovalchuk, Fizika i Tekhnika Poluprovodnikov 29 , 58 (1995).
- (1995) Fizika I Tekhnika Poluprovodnikov , vol.29 , pp. 58
- Babich, V.M.¹ Baran, N.P.² Zotov, K.I.³ Kirica, V.L.⁴ Kovalchuk, V.B.⁵

9
- 3142591302
- i n press
- L.I.Khirunenko, V.I.Shakhovtsov and V.V.Shumov, Fizika i Tekhnika Poluprovodnikov (i n press).
- Fizika I Tekhnika Poluprovodnikov
- Khirunenko, L.I.¹ Shakhovtsov, V.I.² Shumov, V.V.³

10
- 0342943226
- ed. R.Jones (Dordrecht / Boston / London: Kluwer Academic Publishers)
- G.D.Watkins, in "Early Stages of Oxygen Precipitation in Silicon" ed. R.Jones (Dordrecht / Boston / London: Kluwer Academic Publishers) pp.1-18 (1996).
- (1996) Early Stages of Oxygen Precipitation in Silicon , pp. 1-18
- Watkins, G.D.¹

11
- 3142632675
- (Kiev: Institue of Physics of the Academy of Sciences of Ukraine)
- V.L.Vinetskij and I.I.Yaskovets, in: "Physical Processes in Defect Crystals" (Kiev: Institue of Physics of the Academy of Sciences of Ukraine) pp. 76-110 (1990).
- (1990) Physical Processes in Defect Crystals , pp. 76-110
- Vinetskij, V.L.¹ Yaskovets, I.I.²

12
- 0342608752
- T.V.Kritskaja, L.I.Khirunenko, V.I.Shakhovtsov and V.I.Yashnik, Fizika i Tekhnika Poluprovodnikov 22 , 1129 (1990).
- (1990) Fizika I Tekhnika Poluprovodnikov , vol.22 , pp. 1129
- Kritskaja, T.V.¹ Khirunenko, L.I.² Shakhovtsov, V.I.³ Yashnik, V.I.⁴

13
- 0004101812
- (Berlin-Heidelberg-New York, Springer Verlag)
- M.Lannoo and J.Bourgoin in "Point Defects in Semiconductors. Theoretical aspects". (Berlin-Heidelberg-New York, Springer Verlag) p. 246 (1981).
- (1981) Point Defects in Semiconductors. Theoretical Aspects , pp. 246
- Lannoo, M.¹ Bourgoin, J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.