Compositional effects on the degradation of PVD-TiSiN

Materials Research Society Symposium - Proceedings

Volumn 472, Issue , 1997, Pages 325-330

  McArthur, W F ^a   Deng, F ^a   Ring, K ^a   Pattison, P M ^a   Kavanagh, K L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON DIFFRACTION; LEAKAGE CURRENTS; NANOSTRUCTURED MATERIALS; PHASE COMPOSITION; PHASE SEPARATION; SEMICONDUCTING DIAMONDS; TITANIUM ALLOYS; TRANSMISSION ELECTRON MICROSCOPY;

TITANIUM SILICON NITRIDE;

METALLIC FILMS;

EID: 0031339432     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-472-325     Document Type: Conference Paper

References (5)