Integrated optics in silicon: Coming of age

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3007, Issue , 1997, Pages 128-135

  Harpin, Arnold P R ^a  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Active devices; Hybridisation; Integrated optics; Optical switching; Optical transceivers; Passive fibre alignment; Plasma dispersion; Silicon integrated optics; Silicon on insulator; V grooving; Waveguides

Indexed keywords

ALIGNMENT; ELECTROOPTICAL DEVICES; INTEGRATED CIRCUITS; INTEGRATED OPTICS; NONMETALS; OPTICAL FIBERS; OPTICAL MATERIALS; OPTICAL SWITCHES; OPTOELECTRONIC DEVICES; PHOTONICS; PLASMAS; TRANSCEIVERS; WAVEGUIDES; COST EFFECTIVENESS; ELECTRONICS PACKAGING; ETCHING; OPTICAL COMMUNICATION; SILICON ON INSULATOR TECHNOLOGY; TECHNOLOGY;

ACTIVE DEVICES; HYBRIDISATION; OPTICAL SWITCHING; OPTICAL TRANSCEIVERS; PASSIVE FIBRE ALIGNMENT; PLASMA DISPERSION; SILICON INTEGRATED OPTICS; SILICON ON INSULATOR; V GROOVING; RIDGE WAVEGUIDES; V GROOVES;

SILICON ON INSULATOR TECHNOLOGY; INTEGRATED OPTICS;

EID: 0031339397     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.273845     Document Type: Conference Paper

References (11)

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