Effect of N doping on the electron emission properties of DLC film on 2-inch Mo FEAs panel

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 276-280

  Jung, Jae Hoon ^a   Ju, Byeong Kwon ^a   Kim, Hoon ^a   Oh, Myung Hwan ^a   Chung, Suk Jae ^a   Jang, Jin ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTRIC CURRENTS; FIELD EMISSION CATHODES; MOLYBDENUM; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

DIAMOND LIKE CARBON (DLC) FILMS; FIELD EMITTER ARRAYS (FEA); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

ELECTRON EMISSION;

EID: 0031339347     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)