NA/sigma optimization strategies for an advanced DUV stepper applied to 0.25- and sub-0.25-um critical levels

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3051, Issue , 1997, Pages 320-332

  Op de Beeck, Maaike ^a   Ronse, Kurt ^a   Ghandehari, Kouros ^a   Jaenen, Patrick ^a   Botermans, Harry ^a   Finders, Jo ^a   Lilygren, John A ^a   Baker, Daniel C ^a   Vandenberghe, Geert ^a   De Bisschop, Peter ^a   Maenhoudt, Mireille ^a   Van den hove, Luc ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONTROL SYSTEMS; LOGIC DESIGN; OPTIMIZATION; ULTRAVIOLET RADIATION;

CRITICAL DIMENSIONS; DEEP ULTRAVIOLET; NUMERICAL APERTURE; OPTICAL MICROLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0031339252     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)