Internal friction in ion-implanted silicon

Materials Research Society Symposium - Proceedings

Volumn 469, Issue , 1997, Pages 419-424

  Liu, Xiao ^a   Pohl, R O ^a   Crandall, Richard S ^a   Jones, K M ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; AMORPHOUS MATERIALS; ANNEALING; INTERNAL FRICTION; ION IMPLANTATION; LASER APPLICATIONS; OSCILLATORS (ELECTRONIC); RELAXATION PROCESSES;

DOUBLE PADDLE OSCILLATORS;

SILICON WAFERS;

EID: 0031338566     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-469-419     Document Type: Conference Paper

References (17)