Development of high temperature gas sensor technology

American Society of Mechanical Engineers (Paper)

Volumn , Issue , 1997, Pages

  Hunter, Gary W ^a   Chen, Liang Yu ^a   Neudeck, Philip G ^a   Knight, Dak ^a   Liu, C C ^a   Wu, Q H ^a   Zhou, H J ^a  

^a NASA GLENN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS EMISSIONS; HYDROCARBONS; HYDROGEN; MICROMACHINING; NITROGEN OXIDES; OXYGEN; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON CARBIDE;

POINT CONTACT SENSORS;

CHEMICAL SENSORS;

EID: 0031336463     PISSN: 04021215     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)