Reliability study on BST capacitors for GaAs MMIC

Integrated Ferroelectrics

Volumn 15, Issue 1-4, 1997, Pages 69-78

  Noma, Atsushi ^a   Ueda, Daisuke ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; DEEP LEVEL TRANSIENT SPECTROSCOPY; ELECTRON ENERGY LEVELS; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; RELIABILITY; SEMICONDUCTING GALLIUM ARSENIDE; THERMAL STRESS; THIN FILMS;

BARIUM STRONTIUM TITANATE;

CAPACITORS;

EID: 0031334273     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708015697     Document Type: Article

References (3)

1. S. Nagata, Toshiyuki Ueda, A. Noma, H. Koizumi, K. Kanazawa, H. Ishida, Tetsuzo. Ueda, T. Tanaka, Daisuke Ueda, M. Kazumura, G. Kano and C. Paz De Araujo: 1993 International Solid-State Circuits Conference, Digest of Technical Papers, pp.172-173, 1993.
2. B. Melnick, J. Cuchiro, L. Mcmillian, C. Paz De Araujo and J. Scott: Ferroelectrics, vol 112, pp.329-351, 1990.
3. C. Akita and M. Fujimoto: J. Appl. Phys., vol74(4), pp.2669-2673, 1993.