Introduction to Silicon On Insulator materials and devices

Microelectronic Engineering

Volumn 39, Issue 1-4, 1997, Pages 145-154

  Cristoloveanu, Sorin ^a  

^a Grenoble INP Phelma   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS ENGINEERING; MOSFET DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR MATERIALS; SILICON ON INSULATOR TECHNOLOGY; ULSI CIRCUITS;

LOW-VOLTAGE CIRCUITS;

MICROELECTRONICS;

EID: 0031334177     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(97)00172-X     Document Type: Article

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