Preparation of (Pb,La)TiO3 films by metal organic chemical vapor deposition with new lanthanum precursors

Integrated Ferroelectrics

Volumn 14, Issue 1-4, 1997, Pages 85-93

  Neumayer, Deborah A ^a   Purtell, Robert J ^a   Kane, William F ^a   Grill, Alfred ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; LANTHANUM; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; THERMODYNAMIC STABILITY; TRANSPORT PROPERTIES;

LANTHANUM PRECURSORS;

DIELECTRIC FILMS;

EID: 0031334095     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708019980     Document Type: Article

References (10)

1. Eisentraut, K.J.; Sievers, R.E. J. Am. Chem. Soc., 87, 5254 (1965).
2. (a) Rappoli, B.J.; DeSisto, W.J. Materials Research Society BB5.2. 1995 Fall Meeting, Boston, MA.,
3. (b) Busch, H.; Fink, A.; Muller, A.; Samwer, K. Supercond. Sci. Technol. 6, 42, (1992).
4. (c) Chou, K.; Tsai, G. Theromchimica Acta. 240, 129 (1994)
5. (d) Stage, J.P.; Christe, J.; Thrush, E.J.; Crawley, J. J. Crystal Growth, 120, 98 (1992).
6. Sicre, J.E.; Dubois, J.T.; Eisentraut, K.J.; Sievers, R.E. J. Am. Chem. Soc., 91., 347 6(1969).
7. Kuech, T.F.; Jensen, K.F. Thin Film Processes II edited by J.L. Vossen, W. Kern, (Academic Press: Boston, MA, U.S.A. 1991), Chap. 3, p. 377.
8. Drake, S.R.; Lyons, A.; Otway, D.J.; Slawin, A.M.Z.; Williams, D.J. J. Chem. Soc. Dalton Trans., 2379 (1993).
9. Gmelin Handbook of Inorganic Chemistry, Rare Earth Elements. D3, 152-153 and references cited therein (1981).
10. Baxter, I.; Drake, S.R.; Hursthouse, M.B.; Abdul Malik, K.M.; McAlesse, J.; Otway, D.J.; Plakatouras, J.C. Inorg. Chem., 34, 1384 (1995).