Interactive system for wafer emissivity estimation as determined in an RTP chamber

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 29-34

  Fulco, Maurizio ^a   Russo, Onofrio L ^a   Belikov, Sergey ^a   Kosonocky, Walter ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERACTIVE COMPUTER SYSTEMS; LIGHT EMISSION; TEMPERATURE CONTROL; TEMPERATURE MEASUREMENT;

RAPID THERMAL PROCESSING;

SILICON WAFERS;

EID: 0031333965     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-470-29     Document Type: Conference Paper

References (12)