Simulation and fabrication of Spindt type field emitter arrays

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 401-406

  Choi, J H ^a   Zoulkarneev, A R ^a   Kim, J W ^a   Hong, J P ^a   Kim, J M ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; MOLYBDENUM; PHOTOLITHOGRAPHY;

FIELD EMISSION ARRAYS; SPINDT TYPE FIELD EMITTER ARRAYS; TOTAL INTERNAL REFLECTION (TIR) HOLOGRAPHIC LITHOGRAPHY;

FIELD EMISSION CATHODES;

EID: 0031333625     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)