Optimization of the AST hot linerTM for sub-micron production

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 35-41

  Riley, Terrence J ^a   Bremensdorfer, Rolf ^a   Marcus, Steve ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTIMIZATION; PYROMETERS; SILICON NITRIDE; THERMOCOUPLES;

HOT LINER; RAPID THERMAL PROCESSING;

SILICON WAFERS;

EID: 0031333538     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)