Hydrogen populations in PECVD a-Si:H,D

Materials Research Society Symposium - Proceedings

Volumn 467, Issue , 1997, Pages 123-128

  Cull, T S ^a   Kernan, M J ^a   Chan, P H ^a   Fedders, P A ^a   Leopold, D J ^a   Norberg, R E ^a  

^a WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DEUTERIUM; ELECTROCHEMICAL ELECTRODES; FILM PREPARATION; HYDROGEN; HYDROGENATION; MOLECULAR DYNAMICS; PHOTOCONDUCTIVITY; PLASMA APPLICATIONS; PROTONS;

MOLECULAR POPULATION; PLASMA DEPOSITION;

AMORPHOUS SILICON;

EID: 0031332816     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-467-123     Document Type: Conference Paper

References (5)