High fluence Boron implantation into polymers

Radiation Effects and Defects in Solids

Volumn 143, Issue 2, 1997, Pages 139-156

  Vacik, J ^a,b   Cervena, J ^a   Fink, D ^b   Klett, R ^b   Hnatowicz, V ^a   Popok, V ^c,d   Odzhaev, V ^d  

^a NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

^b HAHN MEITNER INSTITUT   (Germany)

^c INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^d BELARUSIAN STATE UNIVERSITY   (Belarus)

Author keywords

Boron; Depth distributions; Diffusion; Gettering; High fluences; Ion implantation; Nuclear damage; Polymers; Surface precipitation; Thermal desorption spectrometry

Indexed keywords

ANNEALING; DESORPTION; DIFFUSION IN SOLIDS; ENERGY TRANSFER; IMPURITIES; POLYMERS; PRECIPITATION (CHEMICAL); RADIATION DAMAGE; SPECTROMETRY; THERMAL EFFECTS;

GETTERING; NUCLEAR DAMAGE; NUCLEAR ENERGY TRANSFER; THERMAL DESORPTION SPECTROMETRY;

ION IMPLANTATION;

EID: 0031332450     PISSN: 10420150     EISSN: None     Source Type: Journal    
DOI: 10.1080/10420159708212955     Document Type: Article

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