Screening SOI substrates for radiation resistant space electronics applications

IEEE International SOI Conference

Volumn , Issue , 1997, Pages 7-9

  Liu, S T ^a   Yue, J ^a   Schrankler, J ^a  

^a HONEYWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; ETCHING; PHOTORESISTS; RADIATION SHIELDING; RANDOM ACCESS STORAGE; SILICON WAFERS; SUBSTRATES; VLSI CIRCUITS;

POINT CONTACT TRANSISTORS (PCT); RADIATION RESISTANT SPACE ELECTRONICS; SEPARATION BY IMPLANTATION OF OXYGEN (SIMOX); STATIC RANDOM ACCESS MEMORY (SRAM);

SILICON ON INSULATOR TECHNOLOGY;

EID: 0031332447     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)