VHF plasma deposition of μc-Si p-layer materials

Materials Research Society Symposium - Proceedings

Volumn 467, Issue , 1997, Pages 795-800

  Deng, X ^a   Jones, S J ^a   Liu, T ^a   Izu, M ^a   Ovshinsky, S R ^a   Hoffman, K ^a  

^a Energy Conversion Devices Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; OPTIMIZATION; PLASMA APPLICATIONS; SEMICONDUCTING SILICON; SILICON SOLAR CELLS;

AMORPHOUS SILICON SOLAR CELLS; DESIGN OF EXPERIMENT APPROACH; VERY HIGH FREQUENCY PLASMA DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0031331681     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-467-795     Document Type: Conference Paper

References (9)