Energy-filtered RHEED and REELS for in situ real time analysis during film growth

Surface Review and Letters

Volumn 4, Issue 3, 1997, Pages 525-534

  Atwater, Harry A ^a   Ahn, C C ^a   Wong, S S ^a,b   He, G ^a   Yoshino, H ^a   Nikzad, S ^a,c  

^a California Institute of Technology   (United States)

^b APPLIED MATERIALS INC   (United States)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031328245     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X9700050X     Document Type: Article

References (16)

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2. C. C. Ahn, S. Nikzad and H. A. Atwater, Mat. Res. Symp Proc. 208, 157 (1991).
3. S. Nikzad, C. C. Ahn and H. A. Atwater, J. Vac. Sci. Technol. B10, 762 (1992).
4. S. Nikzad, S. S. Wong, C. C. Ahn, A. L. Smith and H. A. Atwater, Appl. Phys. Lett. 63, 1414 (1993).
5. R. Holmestad, O. L. Krivanek, R. Hoier, K. Marthinsen and J. C. H. Spence, Ultramicroscopy 52, 454 (1993).
6. C. C. Ahn, unpublished results.
7. Y. Horio, Y. Hashimoto, K. Shiba and A. Ichimiya, Jpn. J. Appl. Phys. 34, 5869 (1995).
8. Y. Horio, Y. Hashimoto and A. Ichimiya, submitted to Appl. Surf. Sci. (1995).
9. B. Müller, "Profilanalyse bei der Reflexionselektronenbeugung (RHEED): elestische und inelastische Streuung" (VDI Verlag, Düsseldorf, 1994).
10. B. Müller and M. Henzler, Rev. Sci. Instrum. 66, 5232 (1995).
11. S. S. Wong, G. He, S. Nikzad, C. C. Ahn and H. A. Atwater, J. Vac. Sci. Technol. A13, 216 (1995).
12. H. A. Atwater, S. S. Wong, C. C. Ahn, S. Nikzad and H. N. Frase, Surf. Sci 298, 273 (1993).
13. Manipulator from Rober Model 2300 MBE, ISA River, Inc.
14. Vieetech VE-052 30 keV RHEED source, Thermionics, Hayward, CA.
15. Previously, we reported in Ref. 1 on REELS measurements conducted with a energy loss spectrometer lacking a differential pumping interface, which compromised system base pressure. All measurements reported here are performed in a new vacuum system with differential pumping of the energy loss spectrometer.
16. Gatan Model 607 Electron Energy Loss Spectrometer, Gatan Inc., Pleasanton, CA.