CMOS position-sensitive photodetectors (PSDs) for integrated sensor systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3100, Issue , 1997, Pages 89-100

  Makynen, Anssi J ^a   Benten, Harold ^a   Ruotsalainen, Tarmo ^a   Rahkonen, Timo E ^a   Kostamovaara, Juha T ^a  

^a UNIVERSITY OF OULU   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRODES; OPTICAL SENSORS; POSITION MEASUREMENT; TRANSISTORS;

INTERELECTRODE RESISTANCE; POSITION-SENSITIVE PHOTODETECTORS;

PHOTODETECTORS;

EID: 0031325391     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)