Si-micromachining in mm-wave circuits

Proceedings of the Topical Symposium on Millimeter Waves

Volumn , Issue , 1997, Pages 85-88

  Katehi, Linda P B ^a   Herrick, Katherine ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MILLIMETER WAVE DEVICES; SEMICONDUCTING SILICON;

MILLIMETER WAVE CIRCUITS;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0031323483     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)