Fabrication of high-melting point metal coating®

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 7, Issue 4, 1997, Pages 90-91

  Bin, Tang ^a,b   Xinfang, Hu ^a,b   Kewei, Xu ^a,b   Congzeng, Wang ^a,b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b Taiyuan University   (China)

Author keywords

Coating high melting; Multiple hollow cathode; Point metal; Sputtering target

Indexed keywords

CATHODES; COATINGS; MOLYBDENUM ALLOYS; SPUTTER DEPOSITION; SPUTTERING; TARGETS;

HIGH MELTING POINT METAL; MULTIPLE HOLLOW CATHODE;

COATING TECHNIQUES;

EID: 0031318622     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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