Micromachining by picosecond laser radiation: Fundamentals and applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3097, Issue , 1997, Pages 252-259

  Jandeleit, J ^a   Russbuldt P ^a   Treusch, H G ^a   Kreutz, E W ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Material processing; Micromachining; Picosecond laser radiation; Pump probe measurements

Indexed keywords

AMPLIFIERS (ELECTRONIC); CERAMIC MATERIALS; EVAPORATION; FEEDBACK; HEAT AFFECTED ZONE; HEATING; LASER MODE LOCKING; MICROMACHINING; MICROSTRUCTURE; NEODYMIUM LASERS; SEMICONDUCTOR MATERIALS; SOLIDIFICATION; ULTRASHORT PULSES; VAPORIZATION;

PICOSECOND LASER RADIATIONS;

LASER BEAM EFFECTS;

EID: 0031301081     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Mikrostrukturierung von metallen und halbleitern dutch ultrkurze pluse
2. Picosecond laser ablation of thin copper films
3. Electron and ion emission in high-intensity laser irradiation of aluminum
4. Ablation of metal films by picosecond laser pulses imaged with high-speed electron microscopy
5. Diodengepumpter, regenerativer verstärker
6. Energiedissipation bei der wechselwirkung ultrakurzer laserimpulse mit festkörpern
7. Beam-solid interactions and phase transformations