Polycapillary focusing optic for low-energy-X-ray fluorescence

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3115, Issue , 1997, Pages 111-116

  Klotzko, Ira ^a   Xiao, Qi Fan ^a  

^a X Ray Optical Systems Inc   (United States)

Author keywords

Capillary; Optics; Polycapillary; Thickness; Thin films; X ray fluorescence; X rays; Xrf

Indexed keywords

CAPILLARY TUBES; COUPLED CIRCUITS; FLUORESCENCE; FOCUSING; LIGHTING; OPTICAL FIBERS; OPTICAL RESOLVING POWER; OPTIMIZATION; PROPORTIONAL COUNTERS; SILICON WAFERS; STATISTICAL METHODS; SUBSTRATES; SURFACE STRUCTURE; THICKNESS MEASUREMENT; THIN FILMS;

LOW-ENERGY-X-RAY FLUORESCENCE (LEXRF); POLYCAPILLARY FOCUSING OPTICS; X-RAY SOURCES;

X RAY OPTICS;

EID: 0031288895     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.277672     Document Type: Conference Paper

References (6)