Coupling and nonlinear effects of cantilever deflection and torsion encountered when simultaneously measuring vertical and lateral forces using the scanning probe method

Wear

Volumn 211, Issue 2, 1997, Pages 198-202

  Mitsuya, Y ^a   Ohshima, Y ^a   Nonogaki, T ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b IHI CORPORATION   (Japan)

Author keywords

Cantilever; Coupling deformation; Deflection; Friction force microscopy; Nonlinear deformation; Torsion

Indexed keywords

DEFLECTION (STRUCTURES); DEFORMATION; FINITE ELEMENT METHOD; MICROSCOPIC EXAMINATION; SENSITIVITY ANALYSIS; STIFFNESS; TORSIONAL STRESS;

CANTILEVERS; FRICTION FORCE MICROSCOPY; SCANNING PROBE MICROSCOPE (SPM);

STRUCTURAL ANALYSIS;

DEFLECTION; FRICTION; NON-LINEAR SYSTEM; PROBE; TRIBOLOGY;

EID: 0031277966     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(97)00121-X     Document Type: Article

References (5)

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3. G. Meyer, N.M. Amer, Appl. Phys. Lett. 57 (20) (1990) 2088-2089.
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5. J.E. Sader, L. White, J. Appl. Phys. 74 (1) (1993) 1-9.