SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Crystal Growth

Volumn 181, Issue 3, 1997, Pages 210-217

Model analysis of segregation phenomena for silicon single crystal growth from the melt

(1) Izumi, Teruo a

a Sumitomo Metal Industries Limited (Japan)

Author keywords

Czochralski; Model; Phosphorus; Segregation; Silicon; Solidification

Indexed keywords

CRYSTAL IMPURITIES; CRYSTAL ORIENTATION; MATHEMATICAL MODELS; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SINGLE CRYSTALS; SOLIDIFICATION;

ENERGY BARRIER; UNDERCOOLING;

CRYSTAL GROWTH FROM MELT;

EID: 0031275676 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(97)00277-7 Document Type: Article

Times cited : (4)

References (21)

1
- 36849125451
- J.A. Burton, R.C. Prim, W.P. Slichter, J. Chem. Phys. 21 (1953) 1987.
- (1953) J. Chem. Phys. , vol.21 , pp. 1987
- Burton, J.A.¹ Prim, R.C.² Slichter, W.P.³

2
- 84952789717
- W.G. Cochran, Proc. Camb. Phil. Soc. 30 (1934) 365.
- (1934) Proc. Camb. Phil. Soc. , vol.30 , pp. 365
- Cochran, W.G.¹

3
- 0040765352
- J.A. Burton, E.D. Kolb, W.P. Slichter, J. Struthers, J. Chem. Phys. 21 (1953) 1991.
- (1953) J. Chem. Phys. , vol.21 , pp. 1991
- Burton, J.A.¹ Kolb, E.D.² Slichter, W.P.³ Struthers, J.⁴

4
- 0000015545
- H. Kodera, Jpn. J. Appl. Phys. 2 (1963) 212.
- (1963) Jpn. J. Appl. Phys. , vol.2 , pp. 212
- Kodera, H.¹

5
- 0342440885
- R.N. Hall, J. Phys. Chem. 57 (1957) 836.
- (1957) J. Phys. Chem. , vol.57 , pp. 836
- Hall, R.N.¹

6
- 84975348590
- J.R. O'Connor, J. Electrochem. Soc. 110 (1963) 338.
- (1963) J. Electrochem. Soc. , vol.110 , pp. 338
- O'Connor, J.R.¹

7
- 0038987133
- M.G. Mil'vidskii, A.V. Berkova, Sov. Phys. Solid State 5 (1963) 517.
- (1963) Sov. Phys. Solid State , vol.5 , pp. 517
- Mil'vidskii, M.G.¹ Berkova, A.V.²

8
- 0001466776
- T. Abe, J. Crystal Growth 24/25 (1974) 463.
- (1974) J. Crystal Growth , vol.24-25 , pp. 463
- Abe, T.¹

9
- 0040765344
- S.E. Bradshow, J. Goorissen, J. Crystal Growth 48 (1980) 514.
- (1980) J. Crystal Growth , vol.48 , pp. 514
- Bradshow, S.E.¹ Goorissen, J.²

10
- 0040845197
- A. Trainor, B.E. Bartlett, Solid-State Electron. 2 (1961) 106.
- (1961) Solid-State Electron. , vol.2 , pp. 106
- Trainor, A.¹ Bartlett, B.E.²

11
- 4243474456
- G. Baralis, J. Crystal Growth 3/4 (1968) 627.
- (1968) J. Crystal Growth , vol.3-4 , pp. 627
- Baralis, G.¹

12
- 0040765341
- Springer, Berlin
- W. Zulehner, Huber, Crystals, Springer, Berlin, 1982, p. 28.
- (1982) Huber, Crystals , pp. 28
- Zulehner, W.¹

13
- 0040765343
- T. Izumi, J. Appl. Phys. 78 (1995) 1492.
- (1995) J. Appl. Phys. , vol.78 , pp. 1492
- Izumi, T.¹

14
- 0029521532
- T. Izumi, H. Morita, T. Fujiwara, H. Fujiwara, S. Inami, Mater. Sci. Forum 196-201 (1995) 109.
- (1995) Mater. Sci. Forum , vol.196-201 , pp. 109
- Izumi, T.¹ Morita, H.² Fujiwara, T.³ Fujiwara, H.⁴ Inami, S.⁵

15
- 0028462242
- H. Sasaki, E. Toizaki, K. Terashima, S. Kimura, Jpn. J. Appl. Phys. 33 (1994) 3803.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 3803
- Sasaki, H.¹ Toizaki, E.² Terashima, K.³ Kimura, S.⁴

16
- 0005282169
- K.A. Jackson, D.R. Uhlman, J.D. Hunt, J. Crystal Growth 1 (1967) 1.
- (1967) J. Crystal Growth , vol.1 , pp. 1
- Jackson, K.A.¹ Uhlman, D.R.² Hunt, J.D.³

17
- 0039579902
- American Society for Metals, Metals Park, OH
- D. Turnbull, Thermodynamics in Metallurgy, American Society for Metals, Metals Park, OH, 1949.
- (1949) Thermodynamics in Metallurgy
- Turnbull, D.¹

18
- 0004041264
- Steinkopff, Dresden
- M. Volmer, Kinetik der Phasenbildung, Steinkopff, Dresden, 1939.
- (1939) Kinetik der Phasenbildung
- Volmer, M.¹

19
- 84934935637
- R. Becker, W. Doring, Ann. Phys. 24 (1935) 719.
- (1935) Ann. Phys. , vol.24 , pp. 719
- Becker, R.¹ Doring, W.²

20
- 0000932478
- V.V. Voronkov, Kristallografiya 17 (1972) 909.
- (1972) Kristallografiya , vol.17 , pp. 909
- Voronkov, V.V.¹

21
- 0030125578
- A.H. Shinohara, K. Omote, S. Kawanishi, Y. Waseda, Jpn. J. Appl. Phys. 35 (1996) 2218.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 2218
- Shinohara, A.H.¹ Omote, K.² Kawanishi, S.³ Waseda, Y.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.