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Physica C: Superconductivity and its Applications

Volumn 290, Issue 3-4, 1997, Pages 345-353

SiO2 passivation film effects on microwave characteristics of YBa2Cu3O7-x-based resonators

(3) Ban, Masahito a,b Suzuki, Katsumi b Enomoto, Youichi b

a KAWASAKI HEAVY INDUSTRIES LTD (Japan)

b SUPERCONDUCTIVITY RESEARCH LABORATORY (Japan)

Author keywords

Accelerated humidity testing; Annealing; Resonator; RF magnetron sputtering; SiO2 passivation film; YBCO degradation

Indexed keywords

ANNEALING; DEGRADATION; MAGNETRON SPUTTERING; MICROWAVE DEVICES; PASSIVATION; PLASMAS; RESONATORS; SILICA; SPUTTER DEPOSITION; SUPERCONDUCTING FILMS; THIN FILMS; YTTRIUM COMPOUNDS;

MICROSTRIP LINE RESONATOR; SILICA FILM; SURFACE DEGRADATION;

OXIDE SUPERCONDUCTORS;

EID: 0031275197 PISSN: 09214534 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-4534(97)01589-X Document Type: Article

Times cited : (4)

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