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Volumn 15, Issue 6, 1997, Pages 1987-1989
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Bias-temperature stability of the Cu(Mg)/SiO2/p-Si metal-oxide-semiconductor capacitors
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Author keywords
[No Author keywords available]
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Indexed keywords
AGING OF MATERIALS;
ANNEALING;
COPPER;
COPPER ALLOYS;
DIFFUSION;
ELECTRIC FIELD EFFECTS;
MAGNESIUM;
MOS DEVICES;
SEMICONDUCTING FILMS;
SEMICONDUCTING SILICON;
SILICA;
THERMODYNAMIC STABILITY;
BIAS TEMPERATURE AGING;
COPPER MAGNESIUM ALLOYS;
SEMICONDUCTOR DEVICE STRUCTURES;
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EID: 0031274562
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (14)
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References (7)
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