A chemical dry etching of Si and SiO2 substrates by F atoms in a discharge flow

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 11, 1997, Pages 6922-6926

  Tsuji, Masaharu ^a   Nishimura, Yukio ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Discharge flow; Dry etching; Emission spectrum; F; Microwave discharge; Si; SiO2

Indexed keywords

ARGON; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; FLOW OF FLUIDS; FLUORINE COMPOUNDS; MICROWAVES; PLASMA ETCHING; SILICA; SILICON WAFERS; SUBSTRATES;

DISCHARGE FLOW; MICROWAVE DISCHARGES;

DRY ETCHING;

EID: 0031274460     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.6922     Document Type: Article

References (18)

1. Y. Horiike: Mandotai Purazuma Purosesu Gijutsu (Semicondoctor Plasma Processing Technology), ed. T. Sugano (Sangyo Tosho, Tokyo, 1980) p. 120 [in Japanese].
2. B. N. Chapman: Glow Discharge Processes: Sputtering and Plasma Etching (Wiley, New York, 1980).
3. K. Akashi, S. Hattori and O. Matsumoto: Hikari-Purazuma Purosesu (Photon and Plasma Processings) (Nikkan Kogyo Shinbunsha, Tokyo, 1986) [in Japanese].
4. Y. Horiike and M. Shibagaki: Proc. Electrochem. Soc., Princeton, 1977, Vol. 77-2, p. 1071.
5. M. A. A. Clyne and W. S. Nip: Reactive Intermediates in the Gas Phase, ed. D. W. Setser (Academic Press, New York, 1979) p. 2.
6. M. Tsuji, H. Kouno, Y. Nishimura, H. Obase and K. Kasatani: J. Chem. Phys. 95 (1991) 7317.
7. S. G. Lias, J. E. Bartmess, J. F. Liebman, J. L. Holmes, R. D. Levin and W. G. Mallard: J. Phys. Chem. Ref. Data 17 (1988) Suppl. 1.
8. K. P. Huber and G. Herzberg: Molecular Spectra and Molecular Structure (Van Nostrand Reinhold, New York, 1979) Constants of Diatomic Molecules, Vol. IV.
9. M.Tsuji: Techniques of Chemistry, ed. J. M. Farrar and W. H. Saunders, Jr. (John Wiley & Sons, New York, 1988) Vol. 20, Chap. 9, p. 489.
10. K. Suzuki and K. Kuchitsu: Chem. Phys. Lett. 56 (1978) 50.
11. K. Suzuki and K. Kuchitsu: Bull. Chem. Soc. Jpn. 50 (1977) 1905.
12. T. D. Nguyen and N. Sadeghi: Chem. Phys. 79 (1983) 41.
13. H. Sekiya, M. Tsuji and Y. Nishimura: Chem. Phys. Lett. 100 (1983) 494.
14. M. Tsuji, T. Funatsu, H. Kouno and Y. Nishimura: J. Chem. Phys. 97 (1992) 8216.
15. A. R. Striganov and N. S. Sventitskii: Tables of Spectral Lines of Neutral and Ionized Atoms (Plenum, New York, 1968).
16. R. W. B. Pearse and A. G. Gaydon: The Identification of Molecular Spectra (Chapman and Hall, London, 1976) 4th ed.
17. M. Tsuji, M. Furusawa, T. Mizuguchi, T. Muraoka and Y. Nishimura: J. Chem. Phys. 97 (1992) 245.
18. S. J. Arnold, G. H. Kimbell and D. R. Snelling: Can. J. Chem. 53 (1975) 2419.