Processing of ZnO thin films for SAW devices

IEE Colloquium (Digest)

Volumn , Issue 317, 1997, Pages

  Hall, D A ^a   Kutepova, V P ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; PIEZOELECTRIC MATERIALS; SILICON SENSORS; SILICON WAFERS; STRAIN CONTROL; THIN FILMS; ZINC OXIDE;

ELECTROMECHANICAL SENSORS;

SEMICONDUCTING ZINC COMPOUNDS;

EID: 0031274121     PISSN: 09633308     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)