Grinding of toroidal and cylindrical surfaces on SiC using diamond grinding wheels

Materials and Manufacturing Processes

Volumn 12, Issue 6, 1997, Pages 1049-1062

  Zhong, Zhaowei ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND CUTTING TOOLS; GRINDING WHEELS; LAPPING; LENSES; MACHINING CENTERS; MIRRORS; POLISHING; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SURFACE ROUGHNESS; SURFACE TESTING;

DUCTILE MODE MACHINING;

GRINDING (MACHINING);

EID: 0031272933     PISSN: 10426914     EISSN: None     Source Type: Journal    
DOI: 10.1080/10426919708935203     Document Type: Article

References (12)

1. Blake, P. N., "Ductile-Regime Turning of Germanium and Silicon," PhD Thesis, North Carolina State University, Raleigh, NC, (1988).
2. Blake, P. N. and R. O. Scattergood, "Ductile Regime Machining of Germanium and Silicon," Journal of American Ceramic Society, Vol.73, pp.949-957, (1990).
3. Inasaki, I., "Grinding of Hard and Brittle Materials," Annals of CIRP, Vol.36, No.2, pp.463-471, (1987).
4. Schinker, M. G., "Subsurface Damage Mechanisms at High Speed Ductile Machining of Optical Glasses," Journal of Precision Engineering, pp.208-218, (1991).
5. Kitajima, K., G. Q. Cai, N. Kumagai, Y. Tanaka, and H. W. Zheng, "Study on Mechanism of Ceramic Grinding," Annals of CIRP, Vol.41, No.1, pp.367-371, (1992).
6. Zhong, Z. and V. C. Venkatesh, "Generation of Parabolic and Toroidal Surfaces on Silicon and Silicon Based Compounds using Diamond Cup Grinding Wheels," Annals of CIRP, Vol.43, No.1, pp.323-326, (1994).
7. Volker, S., "Ductile Grinding of Ultra-Precise Aspherical Optical Lenses," International Symposium of Optical Systems Design, Berlin, (1992).
8. Saile, V. and J. B. West, "VUV and Soft X-Ray Monochromators for Use with Synchrotron Radiation," Nuclear Instruments and Methods, Vol.208, pp. 199-213, (1983).
9. Sato, S., A. Iijima, S. Takeda, M. Yanagihara et al., "SiC mirror development at the Photon Factory," Review of Scientific Instruments, Vol.60, No.7, pp. 1479-1485, (1989).
10. Zhong, Z. and T. Nakagawa, "Development of a Micro-Displacement Table and its Control System," Proceedings of the Japan Society for Precision Engineering Autumn Conference, pp.1057-1058, (1990).
11. Zhong, Z. and T. Nakagawa, "Development of a Displacement table for Ultra-Precision Machining and Curved-Surface Form Generating by the Use of it," Journal of the Japan Society for Precision Engineering, Vol.57, No.7, pp. 1265-1270, (1991).
12. Zhong, Z., "New Grinding Methods for Spherical Mirrors with Large Curvature Radii," Annals of CIRP, Vol.41, No.1, pp.335-338, (1992).