Subwavelength ultrasonic measurement of a very thin fluid layer thickness in a trilayer

Ultrasonics

Volumn 35, Issue 7, 1997, Pages 509-515

  Lenoir, O ^a   Izbicki, J L ^a   Rousseau, M ^b   Coulouvrat, F ^b  

^a UNIVERSITÉ DU HAVRE   (France)

^b SORBONNE UNIVERSITÉ   (France)

Author keywords

Acoustical resonances; Thickness measurement; Ultrasonic characterization

Indexed keywords

RESONANCE; THICKNESS MEASUREMENT;

ACOUSTICAL RESONANCE;

ULTRASONIC MEASUREMENT;

EID: 0031271395     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(97)00069-3     Document Type: Article

References (7)

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2. L.A. Gerosimova, A.V. Fedorov, New interferometric method for thin-film metrology, Proceedings of the SPIE-International Society for Optical Engineering, Vol. 2545, 1995, p. 352.
3. T. Kimura, H. Kanai, N. Chubachi, High-resolution determination of transit time of ultrasound in a thin layer in pulse-echo method, IEEE Transactions on Fundamentals of Electronics-Communications and Computer Sciences, Vol. E78-A, No. 12, 1995, p. 1677.
4. V.K. Kinra, P.T. Jaminet, C. Zhu, V.R. Lyer, Simultaneous measurement of the acoustical properties of a thin-layered medium: the inverse problem, Journal of the Acoustical Society of America 95 (6) (1994) 3059.
5. F. Coulouvrat, O. Lenoir, J-L. Izbicki, M. Rousseau, Lamb-type waves in a symmetric solid-fluid-solid trilayer, Acta Acustica (1997) accepted.
6. M. Rousseau, F. Coulouvrat, O. Lenoir, H. Khelil, J.L. Izbicki, in: M. Ley, S.C. Schneider, B.R. McAvoy (Eds.), Vertical mode for an immersed structure composed of two elastic layers coupled by a thin water film. Proceedings of the 1994 IEEE International Ultrasonics Symposium, Cannes, 2-4 November 1994, Institute of Electrical and Electronics Engineers, New York, 1994, p. 756.
7. R. Fiorito, W. Madigosky, H. Uberall, Resonance theory of acoustic waves interacting with an elastic plate, J. Acoust. Soc. Am. 66 (1979) 1857.