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Volumn 63, Issue 615, 1997, Pages 3735-3742
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Large scale active microvibration control system using piezoelectric actuators applied to semiconductor manufacturing equipment
a a a a
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
ALGORITHMS;
CONTROL SYSTEM SYNTHESIS;
FLEXIBLE STRUCTURES;
LARGE SCALE SYSTEMS;
MATHEMATICAL MODELS;
MODAL ANALYSIS;
OPTIMAL CONTROL SYSTEMS;
PIEZOELECTRIC DEVICES;
SEMICONDUCTOR DEVICE MANUFACTURE;
VIBRATIONS (MECHANICAL);
FREQUENCY FORMING ALGORITHM;
LARGE SCALE ACTIVE MICROVIBRATION CONTROL SYSTEM;
MODEL MATCHING METHOD;
PIEZOELECTRIC ACTUATORS;
SEMICONDUCTOR MANUFACTURING EQUIPMENT;
VIBRATION CONTROL;
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EID: 0031270940
PISSN: 03875024
EISSN: None
Source Type: Journal
DOI: 10.1299/kikaic.63.3735 Document Type: Article |
Times cited : (6)
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References (10)
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