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Volumn 63, Issue 615, 1997, Pages 3735-3742

Large scale active microvibration control system using piezoelectric actuators applied to semiconductor manufacturing equipment

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; CONTROL SYSTEM SYNTHESIS; FLEXIBLE STRUCTURES; LARGE SCALE SYSTEMS; MATHEMATICAL MODELS; MODAL ANALYSIS; OPTIMAL CONTROL SYSTEMS; PIEZOELECTRIC DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; VIBRATIONS (MECHANICAL);

EID: 0031270940     PISSN: 03875024     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaic.63.3735     Document Type: Article
Times cited : (6)

References (10)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.