Influence of the geometry of illumination and viewing beams on displacement measurement errors in interferometric metrology

Optics Communications

Volumn 143, Issue 1-3, 1997, Pages 95-101

  De Veuster, Ch ^a   Slangen, P ^b   Renotte, Y ^a   Berwart, L ^a   Lion, Y ^a  

^a UNIVERSITY OF LIÈGE   (Belgium)

^b ECOLE DES MINES D ALÈS   (France)

Author keywords

Error; Interferometry; Out of plane; Sensitivity; Speckle

Indexed keywords

CALCULATIONS; FIBER OPTICS; OPTICAL FILTERS; SPECKLE;

DISPLACEMENT MEASUREMENT; OUT OF PLANE INTERFEROMETRY;

HOLOGRAPHIC INTERFEROMETRY;

EID: 0031270443     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(97)00336-2     Document Type: Article

References (9)

1. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, Appl. Optics 22 (1983) 3421.
2. K. Creath, P. Hariharan, Appl. Optics 33 (1994) 24.
3. K. Creath, P. Hariharan, Appl. Optics 33 (1994) 2585.
4. C. Joenathan, Appl. Optics 33 (1994) 4147.
5. K. Hibino, B.F. Oreb, D.I. Farrant, K.G. Larkin, J. Opt. Soc. Am. A 12 (1995) 761.
6. M. Sjödahl, L.R. Benckert, Appl. Optics 33 (1994) 7461.
7. P.K. Rastogi, Ed., Holographic Interferometry: principles and methods, Springer Series in Optical Sciences (Springer, Berlin, 1994).
8. R. Jones, C. Wykes, Eds., Holographic and Speckle Interferometry, Cambridge Studies in Modern Optics (Cambridge University Press, Cambridge, 1989).
9. P. Slangen, C. De Veuster, Y. Renotte, L. Berwart, Y. Lion, Opt. Eng. 34 (1995) 3526.