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Volumn 144, Issue 11, 1997, Pages

Metal-induced crystallization of a-Si thin films by non vacuum treatments

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; NICKEL; PALLADIUM; RAMAN SCATTERING; SOLUTIONS; SURFACE TREATMENT; THIN FILMS; VACUUM APPLICATIONS;

EID: 0031269194     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838074     Document Type: Article
Times cited : (7)

References (8)
  • 6
    • 5844374371 scopus 로고    scopus 로고
    • Amorphous and Microcrystalline Silicon Technology
    • paper presented San Francisco, CA
    • A. K. Kalkan and S. J. Fonash, paper presented at the 1997 MRS Spring Meeting; Amorphous and Microcrystalline Silicon Technology, San Francisco, CA (1997).
    • (1997) 1997 MRS Spring Meeting
    • Kalkan, A.K.1    Fonash, S.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.