Microstructural analysis of Pd/Pt/Au/Pd ohmic contacts to InGaP/GaAs

Journal of Materials Science: Materials in Electronics

Volumn 8, Issue 5, 1997, Pages 281-288

  Ivey, D G ^a   Zhang, R ^a   Abid, Z ^b   Eicher, S ^b   Lester, T P ^b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NORTEL NETWORKS   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; GOLD; INTERFACES (MATERIALS); LEAD; METALLOGRAPHIC MICROSTRUCTURE; PALLADIUM; PLATINUM; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DOPING; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON BEAM EVAPORATION; PARTIAL DECOMPOSITION;

OHMIC CONTACTS;

EID: 0031259514     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018531221472     Document Type: Article

References (5)

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