Mechanism of doping gallium arsenide with carbon tetrachloride during organometallic vapor-phase epitaxy

Journal of Electronic Materials

Volumn 26, Issue 10, 1997, Pages 1189-1193

  Warddrip, M L ^a   Kappers, M J ^a   Li, L ^a   Qi, H ^a   Han, B K ^a   Gan, S ^a   Hicks, R F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Carbon doping; Carbon tetrachloride; GaAs (001); Organometallic vapor phase epitaxy (OMVPE); Scanning tunneling microscopy (STM); TPD

Indexed keywords

ADSORPTION; CARBON TETRACHLORIDE; DECOMPOSITION; ETCHING; FILM GROWTH; INFRARED SPECTROSCOPY; METALLORGANIC VAPOR PHASE EPITAXY; REACTION KINETICS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; TEMPERATURE PROGRAMMED DESORPTION;

TERTIARYBUTYLARSINE; TRIETHYLGALLIUM;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0031258795     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0018-7     Document Type: Article

References (21)

1. H. Kroemer, Proc. IEEE 70, 13 (1982).
2. G.W. Wang, IEEE Electron Dev. Lett. 11, 241 (1990).
3. S.A. Stockman, A.W. Hanson, S.M. Lichtenthal, M.T. Fresina, G.E. Hofler, K.C. Hsieh and G.E. Stillman, J. Electron. Mater. 21, 1111 (1992).
4. D.L. Miller and P.M. Asbeck, J. Appl. Phys. 28, 1816 (1985).
5. T.F. Keuch, M.A. Tischler, P.J. Wang, G. Scilla, R. Potemski and F. Cardone, Appl. Phys. Lett. 53, 1317 (1988).
6. P. Enquist, J.A. Hutchby and T.J. de Lyon, J. Appl. Phys. 63, 4485 (1988).
7. M. Wada, M. Seko, K. Sakakibara and Y. Sekiguchi, Jpn. J. Appl. Phys. 28, L1700 (1989).
8. B.T. Cunningham, M.A. Haase, M.J. McCollum, J.E. Baker and G.E. Stillman, Appl. Phys. Lett. 54, 1905 (1989).
9. N.I. Buchan, T.F. Keuch, G. Scilla, F. Cardone and R. Potemski, J. Electron. Mater. 19, 277 (1990).
10. B.T. Cunningham, G.E. Stillman and G.S. Jackson, Appl. Phys. Lett. 56, 361 (1990).
11. M.C. Hanna, Z.H. Lu, E.W. Mao, T. McCormick, E.G. Oh, A. Majerfeld and D.M. Szmyd, J. Cryst. Growth 107, 279 (1991).
12. N.I. Buchan, T.F. Keuch, G. Scilla and G. Cardone, J. Cryst. Growth 110, 405 (1991).
13. S. Stockman, A. Hanson, C. Coloumb, M. Fresina, J. Baker and J. Stillman, J. Electron. Mater. 23, 791 (1994).
14. B.T. Cunningham, J.E. Baker and G.E. Stillman, J. Electron. Mater. 19, 331 (1990).
15. M.C. Hanna, Z.H. Lu and A. Majerfeld, Appl. Phys. Lett. 58, 164 (1991).
16. P.A. Goulding and M.E. Pemble, Surf. Sci. Lett. 247, L201 (1991).
17. L.J. Bellamy, The Infra-red Spectra of Complex Molecules, (New York: Wiley, 1956).
18. E. Maslowsky Jr., Vibrational Spectra of Organometallic Compounds, (New York: Wiley, 1977).
19. K.J. Wilkerson, M.J. Kappers and R.F. Hicks, J. Phys. Chem. A101, 2451 (1990).
20. H. Qi, P.F. Gee and R.F. Hicks, Phys. Rev. Lett. 72, 250 (1994).
21. L. Li, S. Gan, B.K. Han and R.F. Hicks, to be published.