Measuring trace ionic impurities in ultrapure acids and bases with ion chromatography

MICRO

Volumn 15, Issue 9, 1997, Pages 65-78

  Wu, Manli ^a,b,c,d,e   Chen, Jian Ge ^a,b,f,g,h  

^a INSTITUTE OF LIVING   (United States)

^b Olin Corporation   (United States)

^c TAMKANG UNIVERSITY   (Taiwan)

^d NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^e UNIVERSITY OF CONNECTICUT   (United States)

^f DUPONT COMPANY   (United States)

^g STONY BROOK UNIVERSITY   (United States)

^h UNIVERSITY OF PITTSBURGH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROCHLORIC ACID; IMPURITIES; INTEGRATED CIRCUIT MANUFACTURE; ION EXCHANGE; IONS; NITRIC ACID; PHOSPHORIC ACID; PRECIPITATION (CHEMICAL); SULFURIC ACID;

ANIONIC IMPURITIES; AUTONEUTRALIZATION; HEART CUTTING; ION EXCHANGE CHROMATOGRAPHY; ION EXCLUSION CHROMATOGRAPHY; MATRIX ELIMINATION;

CHROMATOGRAPHY;

EID: 0031256253     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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