Comparative characterization of chemical vapor deposition diamond films by scanning cathodoluminescence microscopy

Scanning

Volumn 19, Issue 7, 1997, Pages 455-458

  Obraztsov, A N ^a   Saparin, G V ^a   Obyden, S K ^a   Pavlovsky, I Y ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Backscattered electron contrast in SEM; Color cathodoluminescence; Color CL; CVD diamond films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; EMISSION SPECTROSCOPY; FILM GROWTH; POLYCRYSTALLINE MATERIALS; RAMAN SCATTERING;

BACKSCATTERED ELECTRON CONTRAST; COLOR CATHODOLUMINESCENCE SCANNING ELECTRON MICROSCOPY; PHOTOLUMINESCENCE SPECTROSCOPY; PLASMA DISCHARGES;

SCANNING ELECTRON MICROSCOPY;

DIAMOND; SILICON;

ARTICLE; CHEMOLUMINESCENCE; CRYSTAL STRUCTURE; DIRECT CURRENT; MICROWAVE RADIATION; PRIORITY JOURNAL; RAMAN SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; VAPOR;

EID: 0031251789     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950190701     Document Type: Article

References (8)

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