Diamond growth by dual hollow cathode arc chemical vapor deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 10 SUPPL. B, 1997, Pages

  Liang, Gou Tsau ^a   Hong, Franklin Chau Nan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Arc; Chemical vapor deposition; Diamond film; Electron bombardment; Hollow cathode

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; ELECTRIC DISCHARGES; ELECTRONS; FILM GROWTH; METHANE; PRESSURE EFFECTS; THERMIONIC CATHODES;

ELECTRON BOMBARDMENT;

DIAMOND FILMS;

EID: 0031251101     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1406     Document Type: Article

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