Diamond-like carbon-gate pH-ISFET

Sensors and Actuators, B: Chemical

Volumn 44, Issue 1-3, 1997, Pages 441-445

  Voigt, H ^a,b   Schitthelm, F ^a   Lange, T ^a,c   Kullick, T ^a,d   Ferretti, R ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b TEMIC GmbH   (Germany)

^c PHILIPS RESEARCH LABORATORIES   (Germany)

^d Thyssen AG   (Germany)

Author keywords

Diamond like carbon; Ion selective field effect transistor; Thin films

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL RESISTANT MATERIALS; ELECTROLYTES; ION SENSITIVE FIELD EFFECT TRANSISTORS; MICROPROCESSOR CHIPS; SEMICONDUCTING DIAMONDS; THIN FILMS; VAPOR DEPOSITION;

AMORPHOUS DIAMOND LIKE CARBON (DLC) FILMS; PLASMA VAPOR DEPOSITION (PVD);

PH SENSORS;

EID: 0031250701     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00236-0     Document Type: Article

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