Diamond-like carbon films formed by a filtered fast atom beam source

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 356-361

  Sarangi, D ^a   Panwar, O S ^a   Kumar, Sushil ^a   Dixit, P N ^a   Bhattacharyya, R ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

Author keywords

Diamond like carbon; DLC film formation; Fast atom beam

Indexed keywords

AMORPHOUS FILMS; ATOMIC BEAMS; CURRENT DENSITY; FILM GROWTH; HARDNESS; IONS; METHANE; SPECTROSCOPIC ANALYSIS;

DIAMOND LIKE CARBON (DLC) FILMS; FAST ATOM BEAM (FAB) SOURCES; PHOTOTHERMAL DEFLECTION SPECTROSCOPY (PDS);

DIAMOND FILMS;

EID: 0031250617     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00451-9     Document Type: Article

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